Comparison of Accelerometer Technologies by Memsic Inc.
 
Basic
Technology
Piezoelectric Piezo Film  Liquid Tilt Electomechanical
Servo
Bulk
Micromachined
Surface
Micromachined
Thermal Bulk/Surface
Micromachined
No Proof Mass 
Cost factor High Low Low Highest High Low Lowest
Resolution 2.5 mg  2.5 mg 0.5 mg   20 ug 0.05 mg   0.25 mg  0.5 mg
Performance
 DC Tilt 
No No Yes Yes Yes Yes Yes
Performance
Typ Freq
20 kHz  20 kHz  10 Hz 20 kHz  400 Hz  400 Hz 100-150 Hz
Dual axis No No No No No Yes Yes
Integrated system  Board Board Board Board No On chip On chip
Onchip signal processing No No No No No Yes Yes
Onchip programmability No No No No No No Yes
 Mixed-signal expandability No No No No No No Yes
Self-test capabilities No No No No No On demand Yes (continuous)