| Basic
Technology |
Piezoelectric | Piezo Film | Liquid Tilt | Electomechanical
Servo |
Bulk
Micromachined |
Surface
Micromachined |
Thermal Bulk/Surface
Micromachined No Proof Mass |
| Cost factor | High | Low | Low | Highest | High | Low | Lowest |
| Resolution | 2.5 mg | 2.5 mg | 0.5 mg | 20 ug | 0.05 mg | 0.25 mg | 0.5 mg |
| Performance
DC Tilt |
No | No | Yes | Yes | Yes | Yes | Yes |
| Performance
Typ Freq |
20 kHz | 20 kHz | 10 Hz | 20 kHz | 400 Hz | 400 Hz | 100-150 Hz |
| Dual axis | No | No | No | No | No | Yes | Yes |
| Integrated system | Board | Board | Board | Board | No | On chip | On chip |
| Onchip signal processing | No | No | No | No | No | Yes | Yes |
| Onchip programmability | No | No | No | No | No | No | Yes |
| Mixed-signal expandability | No | No | No | No | No | No | Yes |
| Self-test capabilities | No | No | No | No | No | On demand | Yes (continuous) |